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CHIPS Metrology Ontology

The CHIPS Metrology Ontology originated from a pragmatic desire to understand how the various research entities under the CHIPS Metrology described by the Seven Grand challenges (https://doi.org/10.6028/nist.chips.1000), are related to each other. The named classes within this ontology came from the data management plans and adjacent documents associated with the projects within the Severn Grand Challenges. The class hierarchy was mainly assembled by June Lau. Ontological fine-tuning was advised by Alden Dima, and occasionally with the aid of a large language model. We used the Provenance Ontology (https://www.w3.org/TR/prov-o/) as a base framework, while pre-populating certain classes, particularly around the materials science domain and electron microscopy application) with the Platform DigitalMaterial Core Ontology (https://doi.org/10.1016/j.matdes.2023.112603) and their Electron Microscopy Application Ontology (https://doi.org/10.1007/s40192-024-00378-y).

About this Dataset

Updated: 2026-09-04
Metadata Last Updated: 2026-07-13 00:00:00
Date Created: N/A
Data Provided by:
Dataset Owner: N/A

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Table representation of structured data
Title CHIPS Metrology Ontology
Description The CHIPS Metrology Ontology originated from a pragmatic desire to understand how the various research entities under the CHIPS Metrology described by the Seven Grand challenges (https://doi.org/10.6028/nist.chips.1000), are related to each other. The named classes within this ontology came from the data management plans and adjacent documents associated with the projects within the Severn Grand Challenges. The class hierarchy was mainly assembled by June Lau. Ontological fine-tuning was advised by Alden Dima, and occasionally with the aid of a large language model. We used the Provenance Ontology (https://www.w3.org/TR/prov-o/) as a base framework, while pre-populating certain classes, particularly around the materials science domain and electron microscopy application) with the Platform DigitalMaterial Core Ontology (https://doi.org/10.1016/j.matdes.2023.112603) and their Electron Microscopy Application Ontology (https://doi.org/10.1007/s40192-024-00378-y).
Modified 2026-07-13 00:00:00
Publisher Name National Institute of Standards and Technology
Contact mailto:[email protected]
Keywords CHIPS and Science Act , CHIPS Metrology , METIS , Ontology , Metrology , Metrology Ontology
{
    "identifier": "ark:\/88434\/mds2-4248",
    "accessLevel": "public",
    "contactPoint": {
        "hasEmail": "mailto:[email protected]",
        "fn": "June W. Lau"
    },
    "programCode": [
        "006:047"
    ],
    "landingPage": "",
    "title": "CHIPS Metrology Ontology",
    "description": "The CHIPS Metrology Ontology originated from a pragmatic desire to understand how the various research entities under the CHIPS Metrology described by the Seven Grand challenges (https:\/\/doi.org\/10.6028\/nist.chips.1000), are related to each other. The named classes within this ontology came from the data management plans and adjacent documents associated with the projects within the Severn Grand Challenges. The class hierarchy was mainly assembled by June Lau. Ontological fine-tuning was advised by Alden Dima, and occasionally with the aid of a large language model. We used the Provenance Ontology (https:\/\/www.w3.org\/TR\/prov-o\/) as a base framework, while pre-populating certain classes, particularly around the materials science domain and electron microscopy application) with the Platform DigitalMaterial Core Ontology (https:\/\/doi.org\/10.1016\/j.matdes.2023.112603) and their Electron Microscopy Application Ontology (https:\/\/doi.org\/10.1007\/s40192-024-00378-y).",
    "language": [
        "en"
    ],
    "distribution": [
        {
            "accessURL": "https:\/\/github.com\/usnistgov\/METIS-Semantics",
            "format": "The ontology is in the .ttl format",
            "description": "This repo hosts CHIPS Metrology taxnomies, controlled vocabulary, and ontology",
            "title": "CHIPS METIS Semantics Products"
        },
        {
            "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-4248\/cm_onto_public.ttl",
            "format": "Ontology file using the .ttl serialization",
            "mediaType": "application\/octet-stream",
            "title": "CHIPS Metrology Ontology"
        },
        {
            "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-4248\/4248_README.txt",
            "mediaType": "text\/plain",
            "title": "Readme file"
        }
    ],
    "bureauCode": [
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    "modified": "2026-07-13 00:00:00",
    "publisher": {
        "@type": "org:Organization",
        "name": "National Institute of Standards and Technology"
    },
    "theme": [
        "Information Technology:Digital twins",
        "Information Technology:Data and informatics"
    ],
    "keyword": [
        "CHIPS and Science Act",
        "CHIPS Metrology",
        "METIS",
        "Ontology",
        "Metrology",
        "Metrology Ontology"
    ]
}