EDS spectra measured at E0 = 5 keV for 75 materials are provided along with the standards used for quantification with the NIST DTSA-II software for electron-excited X-ray microanalysis with energy dispersive spectrometry.The data sets are organized according to the analytical instrument platform used, and an EDS detector configuration appropriate to each EDS spectrometer is provided . Each folder contains spectra for that specific material and the standards used as well as an Excel file summarizing the DTSA-II results in terms of the raw mass concentrations, normalized mass concentrations, and atomic concentrations. Each calculated compositional value is accompanied by the uncertainty budget as estimated by DTSA-II.An Excel file (5keV_accuracy_summary_DTSA-II) containing an overall summary of results for all 75 materials is provided.
About this Dataset
Title | Data to accompany "Low Electron Beam Energy X-ray Microanalysis: The Adventure Continues!" |
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Description | EDS spectra measured at E0 = 5 keV for 75 materials are provided along with the standards used for quantification with the NIST DTSA-II software for electron-excited X-ray microanalysis with energy dispersive spectrometry.The data sets are organized according to the analytical instrument platform used, and an EDS detector configuration appropriate to each EDS spectrometer is provided . Each folder contains spectra for that specific material and the standards used as well as an Excel file summarizing the DTSA-II results in terms of the raw mass concentrations, normalized mass concentrations, and atomic concentrations. Each calculated compositional value is accompanied by the uncertainty budget as estimated by DTSA-II.An Excel file (5keV_accuracy_summary_DTSA-II) containing an overall summary of results for all 75 materials is provided. |
Modified | 2022-12-06 00:00:00 |
Publisher Name | National Institute of Standards and Technology |
Contact | mailto:[email protected] |
Keywords | SEM-EDS , SEM , EDS , scanning electron microscopy , energy dispersive X-ray spectrometry , X-ray spectrometry , silicon-drift detector , SDD , low beam energy , low keV |
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