{
    "identifier": "ark:\/88434\/mds2-2975",
    "accessLevel": "public",
    "contactPoint": {
        "hasEmail": "mailto:[email protected]",
        "fn": "Nicholas Ritchie"
    },
    "programCode": [
        "006:045"
    ],
    "@type": "dcat:Dataset",
    "landingPage": "https:\/\/data.nist.gov\/od\/id\/mds2-2975",
    "description": "Spectra measured from SRM-2063a and standards at 20 keV, 25 keV and 30 keV.  Scripts for processing this data.  Scripts for Monte Carlo simulating thin films of ADM-6005a and Al2O3 on CaF2 and for quantifying these simulated spectra.",
    "language": [
        "en"
    ],
    "title": "Data and scripts associated with \"Quantification of STEM-in-SEM Energy Dispersive X-ray Spectra using Bulk Standards\"",
    "distribution": [
        {
            "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2975\/2975_README.txt",
            "format": "Text",
            "description": "The read_me file associated with this data set.",
            "mediaType": "text\/plain",
            "title": "READ_ME"
        },
        {
            "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2975\/STEMinSEM.zip",
            "format": "ZIP Archive File",
            "description": "X-ray spectra and scripts in a zip file",
            "mediaType": "application\/zip",
            "title": "STEM-in-SEM dataset"
        }
    ],
    "license": "https:\/\/www.nist.gov\/open\/license",
    "bureauCode": [
        "006:55"
    ],
    "modified": "2023-04-04 00:00:00",
    "publisher": {
        "@type": "org:Organization",
        "name": "National Institute of Standards and Technology"
    },
    "accrualPeriodicity": "irregular",
    "theme": [
        "Materials:Materials characterization",
        "Materials:Ceramics",
        "Materials:Composites",
        "Materials:Metals",
        "Materials:Superconductors"
    ],
    "issued": "2023-05-19",
    "keyword": [
        "Quantitative electron-excited X-ray microanalysis",
        "energy-dispersive spectrometry (EDS)",
        "STEM-in-SEM",
        "NIST DTSA-II software",
        "bulk standards",
        "thin films",
        "thickness"
    ]
}