Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"

Data provided by National Institute of Standards and Technology
This repository contains all of the data used in the manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement," by Thomas A. Germer, T. Brian Renegar, Ulf Griesmann, and Johannes A. Soons, which will be submitted for publication in Surface Topography: Metrology and Properties. The repository also contains a Python Jupyter notebook that performs the analysis of the data and generates the figures in the manuscript.
About this Dataset

Updated: 2024-09-06
Metadata Last Updated: 2023-11-24 00:00:00
Date Created: N/A
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Dataset Owner: N/A
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Title	Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"
Description	This repository contains all of the data used in the manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement," by Thomas A. Germer, T. Brian Renegar, Ulf Griesmann, and Johannes A. Soons, which will be submitted for publication in Surface Topography: Metrology and Properties. The repository also contains a Python Jupyter notebook that performs the analysis of the data and generates the figures in the manuscript.
Modified	2023-11-24 00:00:00
Publisher Name	National Institute of Standards and Technology
Contact	mailto:[email protected]
Keywords	Coherent , Scanning , Interferometry , Microscopy
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    ],
    "bureauCode": [
        "006:55"
    ],
    "modified": "2023-11-24 00:00:00",
    "publisher": {
        "@type": "org:Organization",
        "name": "National Institute of Standards and Technology"
    },
    "theme": [
        "Metrology:Dimensional metrology"
    ],
    "keyword": [
        "Coherent",
        "Scanning",
        "Interferometry",
        "Microscopy"
    ]
}
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Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"

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Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"

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