{
    "identifier": "ark:\/88434\/mds2-2815",
    "accessLevel": "public",
    "contactPoint": {
        "hasEmail": "mailto:[email protected]",
        "fn": "Vladimir Aksyuk"
    },
    "programCode": [
        "006:045"
    ],
    "landingPage": "https:\/\/data.nist.gov\/od\/id\/mds2-2815",
    "title": "Data for manuscript: Integrated photonic optomechanical atomic force microscopy  probes batch fabricated using deep UV photolithography",
    "description": "Data from figure 4 \"Measuring photonic optomechanical devices\" in manuscript \"Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography,\"\u00a0in\u00a0Journal of Microelectromechanical Systems, doi: 10.1109\/JMEMS.2023.3247300.",
    "language": [
        "en"
    ],
    "distribution": [
        {
            "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2815\/Fig4b_experimental_data.csv",
            "description": "Broad wavelength scan for transverse magnetic (TM) polarized modes of a typical disk-cantilever device (w = 150 nm, G = 180 nm )",
            "mediaType": "text\/csv",
            "title": "Experimental data for figure 4(b)"
        },
        {
            "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2815\/Fig4c_experimental_data.csv",
            "description": "High-Q optical resonance indicated with an red arrow in (b)",
            "mediaType": "text\/csv",
            "title": "Experimental data for Figure 4c"
        },
        {
            "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2815\/Fig4c_fit_data.csv",
            "description": "Lorentzian fit Q=64000",
            "mediaType": "text\/csv",
            "title": "Fit data for Figure 4c"
        },
        {
            "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2815\/Fig4d_experimental_data_10um.csv",
            "description": "Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red)  presents a lowest in-plane mode eigenfrequency of ?_0\/2? ? 5 MHz and damping coefficient ?\/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0\/2? ? 25 MHz and damping coefficient ?\/2? ? 0.28 MHz.",
            "mediaType": "text\/csv",
            "title": "Experimental data for figure 4d, 10 micrometer disk."
        },
        {
            "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2815\/Fig4d_experimental_data_5um.csv",
            "description": "Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red)  presents a lowest in-plane mode eigenfrequency of ?_0\/2? ? 5 MHz and damping coefficient ?\/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0\/2? ? 25 MHz and damping coefficient ?\/2? ? 0.28 MHz.",
            "mediaType": "text\/csv",
            "title": "Experimental data for Figure 4d, 5 micrometer disk"
        }
    ],
    "bureauCode": [
        "006:55"
    ],
    "modified": "2022-10-10 00:00:00",
    "publisher": {
        "@type": "org:Organization",
        "name": "National Institute of Standards and Technology"
    },
    "theme": [
        "Nanotechnology:Nanofabrication\/manufacturing",
        "Nanotechnology:Nanomechanics",
        "Nanotechnology:Nanophotonics"
    ],
    "keyword": [
        "integrated photonics",
        "cavity optomechanical sensors"
    ]
}