{
    "identifier": "ECBCC1C130092ED9E04306570681B10715",
    "accessLevel": "public",
    "references": [
        "https:\/\/www.nist.gov\/system\/files\/documents\/srd\/SRD82UsersGuideV1-3.pdf",
        "https:\/\/dx.doi.org\/10.1116\/1.3071947"
    ],
    "contactPoint": {
        "hasEmail": "mailto:[email protected]",
        "@type": "vcard:Contact",
        "fn": "Cedric J. Powell"
    },
    "programCode": [
        "006:052"
    ],
    "@type": "dcat:Dataset",
    "landingPage": "https:\/\/www.nist.gov\/srd\/nist-standard-reference-database-82",
    "description": "The NIST Electron Effective Attenuation Length Database provides values of electron effective attenuation lengths (EALs) in materials at user-selected electron energies between 50 eV and 2,000 eV. The database was designed mainly to provide EALs (to account for effects of elastic-electron scattering) for measurements of the thicknesses of overlayer films and, to a much lesser extent, for measurements of the depths of thin marker layers. EALs are calculated using an algorithm based on electron transport theory for measurement conditions specified by the user. A critical review on the EAL has been published [A. Jablonski and C. J. Powell, Surf. Science Reports 47, 33 (2002)], and simple practical expressions for the EAL, mean escape depth, and information depth are given in another paper by the same authors [J. Vac. Sci. Technol. A 27, 253 (2009)].",
    "language": [
        "en"
    ],
    "title": "NIST Electron Effective-Attenuation-Length Database - SRD 82",
    "distribution": [
        {
            "accessURL": "https:\/\/www-s.nist.gov\/srd_online\/index.cfm?fuseaction=home.main&productID=SRD82v1.3",
            "description": "This database is free, but requires that a form be filled out in order to be able to download.",
            "title": "Form to download the database"
        },
        {
            "accessURL": "https:\/\/dx.doi.org\/10.18434\/T4MK5P",
            "format": "text\/html",
            "description": "DOI Access to NIST Electron Effective-Attenuation-Length Database - SRD 82",
            "mediaType": "text\/html",
            "title": "DOI Access to NIST Electron Effective-Attenuation-Length Database - SRD 82"
        }
    ],
    "license": "https:\/\/www.nist.gov\/open\/license",
    "bureauCode": [
        "006:55"
    ],
    "modified": "2011-01-01 00:00:00",
    "publisher": {
        "@type": "org:Organization",
        "name": "National Institute of Standards and Technology"
    },
    "accrualPeriodicity": "irregular",
    "theme": [
        "Standards:Reference data"
    ],
    "keyword": [
        "Auger electron spectroscopy",
        "ESCA",
        "XPS",
        "depth distribution function",
        "effective attenuation length",
        "electron spectroscopy for chemical analysis",
        "material database",
        "photoelectron",
        "photoelectron spectroscopy",
        "photoemission",
        "surface analysis",
        "x-ray photoelectron spectroscopy"
    ]
}