U.S. flag

An official website of the United States government

Dot gov

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Https

Secure .gov websites use HTTPS
A lock () or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Breadcrumb

  1. Home

NIST MEMS Calculator - SRD 166

This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.

About this Dataset

Updated: 2024-02-22
Metadata Last Updated: 2014-05-22 00:00:00
Date Created: N/A
Views:
Data Provided by:
ASTM
Dataset Owner: N/A

Access this data

Contact dataset owner Access URL
Landing Page URL
Table representation of structured data
Title NIST MEMS Calculator - SRD 166
Description This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.
Modified 2014-05-22 00:00:00
Publisher Name National Institute of Standards and Technology
Contact mailto:richard.allen@nist.gov
Keywords ASTM , MEMS 5 in 1 , MEMS Calculators , Micro Electro Mechanical Systems , Semiconductor Equipment and Materials International , Standard Reference Material , Young's modulus measurements , cantilevers , data analysis sheets , fixed-fixed beams , height measurements , interferometries , length measurements , residual strains , residual stresses , steps , strain gradients , stress gradients , test structures , thick , vibrometries
{
    "identifier": "FDB5909746905200E043065706813E54152",
    "accessLevel": "public",
    "references": [
        "http:\/\/pml.nist.gov\/test-structures\/10-FilesToDownload\/FCMN.2013.pdf",
        "http:\/\/pml.nist.gov\/test-structures\/10-FilesToDownload\/ICMTS.2012.pdf",
        "https:\/\/www.nist.gov\/news-events\/news\/2013\/04\/new-nist-measurement-tool-target-fast-growing-mems-industry",
        "http:\/\/ws680.nist.gov\/publication\/get_pdf.cfm?pub_id=914939",
        "http:\/\/ws680.nist.gov\/publication\/get_pdf.cfm?pub_id=909186",
        "https:\/\/dx.doi.org\/10.6028\/NIST.SP.260-177"
    ],
    "contactPoint": {
        "hasEmail": "mailto:richard.allen@nist.gov",
        "fn": "Richard A. Allen"
    },
    "programCode": [
        "006:052"
    ],
    "@type": "dcat:Dataset",
    "landingPage": "http:\/\/pml.nist.gov\/test-structures\/MEMSCalculator.htm",
    "description": "This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.",
    "language": [
        "en"
    ],
    "title": "NIST MEMS Calculator - SRD 166",
    "distribution": [
        {
            "accessURL": "https:\/\/dx.doi.org\/10.18434\/T4CS3T",
            "format": "text\/html",
            "description": "DOI Access to NIST MEMS Calculator - SRD 166",
            "mediaType": "text\/html",
            "title": "DOI Access to NIST MEMS Calculator - SRD 166"
        }
    ],
    "license": "https:\/\/www.nist.gov\/open\/license",
    "bureauCode": [
        "006:55"
    ],
    "modified": "2014-05-22 00:00:00",
    "publisher": {
        "@type": "org:Organization",
        "name": "National Institute of Standards and Technology"
    },
    "accrualPeriodicity": "irregular",
    "theme": [
        "Standards:Reference materials",
        "Electronics:Semiconductors",
        "Standards:Reference data"
    ],
    "keyword": [
        "ASTM",
        "MEMS 5 in 1",
        "MEMS Calculators",
        "Micro Electro Mechanical Systems",
        "Semiconductor Equipment and Materials International",
        "Standard Reference Material",
        "Young's modulus measurements",
        "cantilevers",
        "data analysis sheets",
        "fixed-fixed beams",
        "height measurements",
        "interferometries",
        "length measurements",
        "residual strains",
        "residual stresses",
        "steps",
        "strain gradients",
        "stress gradients",
        "test structures",
        "thick",
        "vibrometries"
    ]
}

Was this page helpful?