Data provided by National Institute of Standards and Technology
Energy dispersive X-ray spectroscopy (EDX) tomographic tilt series of a needle-shaped sample extracted from NIST SRM 2135c.
Sample description: This SRM consists of alternating layers of nickel and chromium on a silicon substrate (see SRM certificate for further detail).
Data description. The scan size for each spectrum image (SI) is 128 pixels x 100 pixels and 4000 spectral channels deep. EDX data were collected using the following parameters:
Beam energy (keV): 300.0
Probe current: 0.5 nA
Pixel size: 3.0 nm
Dwell time per pixel: 200 msec
Energy resolution: 10 eV/channel
The SI's were collected over a 180 degree range of specimen tilts with a 5 degree tilt step between each acquisition.
About this Dataset
Updated: 2026-09-19
Metadata Last Updated:
2024-11-05 00:00:00
Date Created:
N/A
Data Provided by:
Dataset Owner:
N/A
| Title | NIST SRM 2135c Hyperspectral Tomography Tilt Series |
|---|---|
| Description | Energy dispersive X-ray spectroscopy (EDX) tomographic tilt series of a needle-shaped sample extracted from NIST SRM 2135c. Sample description: This SRM consists of alternating layers of nickel and chromium on a silicon substrate (see SRM certificate for further detail). Data description. The scan size for each spectrum image (SI) is 128 pixels x 100 pixels and 4000 spectral channels deep. EDX data were collected using the following parameters: Beam energy (keV): 300.0 Probe current: 0.5 nA Pixel size: 3.0 nm Dwell time per pixel: 200 msec Energy resolution: 10 eV/channel The SI's were collected over a 180 degree range of specimen tilts with a 5 degree tilt step between each acquisition. |
| Modified | 2024-11-05 00:00:00 |
| Publisher Name | National Institute of Standards and Technology |
| Contact | mailto:[email protected] |
| Keywords | electron tomography , EDX , STEM , 3-D imaging , electron microscopy |
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"title": "NIST SRM 2135c Hyperspectral Tomography Tilt Series",
"description": "Energy dispersive X-ray spectroscopy (EDX) tomographic tilt series of a needle-shaped sample extracted from NIST SRM 2135c.\n\nSample description: This SRM consists of alternating layers of nickel and chromium on a silicon substrate (see SRM certificate for further detail).\n\nData description. The scan size for each spectrum image (SI) is 128 pixels x 100 pixels and 4000 spectral channels deep. EDX data were collected using the following parameters:\n\nBeam energy (keV): 300.0\nProbe current: 0.5 nA\nPixel size: 3.0 nm\nDwell time per pixel: 200 msec\nEnergy resolution: 10 eV\/channel\n\nThe SI's were collected over a 180 degree range of specimen tilts with a 5 degree tilt step between each acquisition.",
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