Data provided by National Institute of Standards and Technology
SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. Since each chip is serialized, the raw data for a specific SRM chip can be accessed from this dataset. In addition to the laser Doppler vibrometry data and optical micrograph, this dataset contains the Mathematica code used to process the data. This code reads the binary file formats from the Polytec.pvd files and calculates vibration spectra and fitted peak values that are then exported into the Excel files that are being made available for each chip.
About this Dataset
Updated: 2026-08-20
Metadata Last Updated:
2021-08-26 00:00:00
Date Created:
N/A
Data Provided by:
Dataset Owner:
N/A
| Title | Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness |
|---|---|
| Description | SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. Since each chip is serialized, the raw data for a specific SRM chip can be accessed from this dataset. In addition to the laser Doppler vibrometry data and optical micrograph, this dataset contains the Mathematica code used to process the data. This code reads the binary file formats from the Polytec.pvd files and calculates vibration spectra and fitted peak values that are then exported into the Excel files that are being made available for each chip. |
| Modified | 2021-08-26 00:00:00 |
| Publisher Name | National Institute of Standards and Technology |
| Contact | mailto:[email protected] |
| Keywords | SRM 3461 , Cantilever , MEMS , Stiffness , laser Doppler vibrometer , LDV |
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"title": "Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness",
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],
"bureauCode": [
"006:55"
],
"modified": "2021-08-26 00:00:00",
"publisher": {
"@type": "org:Organization",
"name": "National Institute of Standards and Technology"
},
"theme": [
"Metrology:Acoustic\/vibration metrology",
"Metrology:Force metrology",
"Nanotechnology:Nanofabrication\/manufacturing",
"Nanotechnology:Nanomechanics"
],
"keyword": [
"SRM 3461",
"Cantilever",
"MEMS",
"Stiffness",
"laser Doppler vibrometer",
"LDV"
]
}
