Data provided by National Institute of Standards and Technology
X-ray computed tomography (XCT) is a nondestructive method that uses multiple X-ray projections to create detailed 3D internal models of materials without damaging them. In the semiconductor industry, XCT is used for failure analysis, quality control, and process improvement. Integrated circuit (IC) packages can be inspected with XCT to detect failures and counterfeit components. However, there are limited data sets publicly available containing XCT measurements of advanced packages.
This repository contains XCT measurements of a graphics processing unit (GPU), specifically an NVIDIA Tesla P100. Furthermore, a Python workflow that simulates XCT measurements (i.e., virtual experiments) is demonstrated which successfully captures key artifacts commonly seen in the XCT measurements. By making this XCT data more accessible, we aim to lower the barrier towards future developments in XCT reconstruction algorithms and 3D image post-processing.
Regarding the experimental data, the XCT instrument used for these measurements was a Zeiss Xradia Versa XRM 500. Included in this repository are X-ray projection images and the corresponding volumetric reconstructions. Numerous measurements were performed with varying XCT parameters (e.g., pixel resolution). Notable package-related features that can be observed in the data include ball grid arrays (BGA), redistribution layers (RDL), through-silicon vias (TSV), controlled collapse chip connections (C4), and micro-bumps. Additional information can be found in the ReadMe files in this repository.
Artifacts present in XCT reconstruction images can complicate feature segmentation and create ambiguity about whether observed details are genuine or merely measurement errors. The Python workflow also provided in this repository offers important insight in this regard. As a first step, a simplified chip-like structure is procedurally generated and serves as the reference geometry, or ground truth. Then, simulations of X-ray projections are performed, which are then reconstructed like what is typically done in XCT. The result is a set of images from simulated XCT data that contains similar artifacts to those seen in real XCT data. However, in this case, the reference images are known; they can be directly compared to the simulated reconstructions to determine what are and are not artifacts. Additional information can be found in the ReadMe files in this repository, and ongoing updates to this Python workflow will be available on the official GitHub page, https://github.com/usnistgov/xsim-chip.
NIST Disclaimer:
Any identification of commercial or open-source software in this document is done so purely in order to specify the methodology adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the software identified are necessarily the best available for the purpose.
NIST Software License:
See "LICENSE.txt" in the repository.
About this Dataset
Updated: 2026-09-04
Metadata Last Updated:
2026-04-17 00:00:00
Date Created:
N/A
Data Provided by:
Dataset Owner:
N/A
| Title | X-ray Computed Tomography Experiments and Simulations of an Advanced Integrated Circuit Package |
|---|---|
| Description | X-ray computed tomography (XCT) is a nondestructive method that uses multiple X-ray projections to create detailed 3D internal models of materials without damaging them. In the semiconductor industry, XCT is used for failure analysis, quality control, and process improvement. Integrated circuit (IC) packages can be inspected with XCT to detect failures and counterfeit components. However, there are limited data sets publicly available containing XCT measurements of advanced packages. This repository contains XCT measurements of a graphics processing unit (GPU), specifically an NVIDIA Tesla P100. Furthermore, a Python workflow that simulates XCT measurements (i.e., virtual experiments) is demonstrated which successfully captures key artifacts commonly seen in the XCT measurements. By making this XCT data more accessible, we aim to lower the barrier towards future developments in XCT reconstruction algorithms and 3D image post-processing. Regarding the experimental data, the XCT instrument used for these measurements was a Zeiss Xradia Versa XRM 500. Included in this repository are X-ray projection images and the corresponding volumetric reconstructions. Numerous measurements were performed with varying XCT parameters (e.g., pixel resolution). Notable package-related features that can be observed in the data include ball grid arrays (BGA), redistribution layers (RDL), through-silicon vias (TSV), controlled collapse chip connections (C4), and micro-bumps. Additional information can be found in the ReadMe files in this repository. Artifacts present in XCT reconstruction images can complicate feature segmentation and create ambiguity about whether observed details are genuine or merely measurement errors. The Python workflow also provided in this repository offers important insight in this regard. As a first step, a simplified chip-like structure is procedurally generated and serves as the reference geometry, or ground truth. Then, simulations of X-ray projections are performed, which are then reconstructed like what is typically done in XCT. The result is a set of images from simulated XCT data that contains similar artifacts to those seen in real XCT data. However, in this case, the reference images are known; they can be directly compared to the simulated reconstructions to determine what are and are not artifacts. Additional information can be found in the ReadMe files in this repository, and ongoing updates to this Python workflow will be available on the official GitHub page, https://github.com/usnistgov/xsim-chip. NIST Disclaimer: Any identification of commercial or open-source software in this document is done so purely in order to specify the methodology adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the software identified are necessarily the best available for the purpose. NIST Software License: See "LICENSE.txt" in the repository. |
| Modified | 2026-04-17 00:00:00 |
| Publisher Name | National Institute of Standards and Technology |
| Contact | mailto:[email protected] |
| Keywords | x-ray , tomography , integrated circuit , package , chip , graphics processing unit , gpu , python , simulation |
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