Data provided by National Institute of Standards and Technology
Electron tomography tilt series data, reconstruction, and data processing code for three-dimensional imaging of a gate-all-around (GAA) transistor layer extracted from a commercially available chip.
This data was collected on July 21, 2025.
About this Dataset
Updated: 2026-09-04
Metadata Last Updated:
2026-07-22 00:00:00
Date Created:
N/A
Data Provided by:
Dataset Owner:
N/A
| Title | Scanning transmission electron tomography of in-plane gate-all-around transistors from a commercially available device |
|---|---|
| Description | Electron tomography tilt series data, reconstruction, and data processing code for three-dimensional imaging of a gate-all-around (GAA) transistor layer extracted from a commercially available chip. This data was collected on July 21, 2025. |
| Modified | 2026-07-22 00:00:00 |
| Publisher Name | National Institute of Standards and Technology |
| Contact | mailto:[email protected] |
| Keywords | tomography , STEM , HAADF , 3D , CHIPS , gate-all-around , transistor , nanocharacterization |
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"fn": "Andrew Herzing"
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"title": "Scanning transmission electron tomography of in-plane gate-all-around transistors\nfrom a commercially available device\n",
"description": "Electron tomography tilt series data, reconstruction, and data processing code for three-dimensional imaging of a gate-all-around (GAA) transistor layer extracted from a commercially available chip.\n\nThis data was collected on July 21, 2025.",
"language": [
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"distribution": [
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"downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-4257\/STEM_HAADF_Tomography_GAA_InPlane.zip",
"mediaType": "application\/x-zip-compressed",
"title": "STEM HAADF Tomography GAA"
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"modified": "2026-07-22 00:00:00",
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"name": "National Institute of Standards and Technology"
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"theme": [
"Electronics:Semiconductors",
"Materials:Materials characterization"
],
"keyword": [
"tomography",
"STEM",
"HAADF",
"3D",
"CHIPS",
"gate-all-around",
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