Data provided by National Institute of Standards and Technology
Data supporting: "The accuracy of electron-excited X-ray microanalysis with energy dispersive spectrometry (EDS) has been tested in the low beam energy range, specifically at an incident beam energy of 5 keV, which is the lowest beam energy for which a useful characteristic X-ray peak can be excited for all elements of the periodic table, excepting H and He. Elemental analysis results are reported for Certified Reference Materials (CRM), stoichiometric compounds, minerals, and metal alloys of independently known or measured composition and which had microscopic homogeneity suitable for microanalysis. 263 concentration measurements for 39 elements in 113 materials were determined following the k-ratio protocol and using the EDS analytical software NIST DTSA-II. The accuracy of the results, as characterized by the relative deviation from expected value (RDEV) metric, was such that more than 98% of the results were found to be captured within a range of ±5% RDEV, while 82% of the results fell in the range -2% to 2% RDEV. "
About this Dataset
Updated: 2026-09-19
Metadata Last Updated:
2024-04-18 00:00:00
Date Created:
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| Title | Data associated with Newbury & Ritchie "Testing the Accuracy of Low Beam Energy Electron-Excited X-ray Microanalysis with Energy Dispersive Spectrometry " |
|---|---|
| Description | Data supporting: "The accuracy of electron-excited X-ray microanalysis with energy dispersive spectrometry (EDS) has been tested in the low beam energy range, specifically at an incident beam energy of 5 keV, which is the lowest beam energy for which a useful characteristic X-ray peak can be excited for all elements of the periodic table, excepting H and He. Elemental analysis results are reported for Certified Reference Materials (CRM), stoichiometric compounds, minerals, and metal alloys of independently known or measured composition and which had microscopic homogeneity suitable for microanalysis. 263 concentration measurements for 39 elements in 113 materials were determined following the k-ratio protocol and using the EDS analytical software NIST DTSA-II. The accuracy of the results, as characterized by the relative deviation from expected value (RDEV) metric, was such that more than 98% of the results were found to be captured within a range of ±5% RDEV, while 82% of the results fell in the range -2% to 2% RDEV. " |
| Modified | 2024-04-18 00:00:00 |
| Publisher Name | National Institute of Standards and Technology |
| Contact | mailto:[email protected] |
| Keywords | X-ray micronalysis , Energy dispersive X-ray spectrometry , EDS , EDX , XEDS , Silicon drift detector , SDD , Low beam energy , quantitative x-ray microanalysis |
{
"identifier": "ark:\/88434\/mds2-3244",
"accessLevel": "public",
"contactPoint": {
"hasEmail": "mailto:[email protected]",
"fn": "Nicholas Ritchie"
},
"programCode": [
"006:045"
],
"landingPage": "https:\/\/data.nist.gov\/od\/id\/mds2-3244",
"title": "Data associated with Newbury & Ritchie \"Testing the Accuracy of Low Beam Energy Electron-Excited X-ray Microanalysis with Energy Dispersive Spectrometry \"",
"description": "Data supporting: \"The accuracy of electron-excited X-ray microanalysis with energy dispersive spectrometry (EDS) has been tested in the low beam energy range, specifically at an incident beam energy of 5 keV, which is the lowest beam energy for which a useful characteristic X-ray peak can be excited for all elements of the periodic table, excepting H and He. Elemental analysis results are reported for Certified Reference Materials (CRM), stoichiometric compounds, minerals, and metal alloys of independently known or measured composition and which had microscopic homogeneity suitable for microanalysis. 263 concentration measurements for 39 elements in 113 materials were determined following the k-ratio protocol and using the EDS analytical software NIST DTSA-II. The accuracy of the results, as characterized by the relative deviation from expected value (RDEV) metric, was such that more than 98% of the results were found to be captured within a range of \u00b15% RDEV, while 82% of the results fell in the range -2% to 2% RDEV. \"",
"language": [
"en"
],
"distribution": [
{
"downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-3244\/Low%20Beam%20Energy%20Analysis.zip",
"format": "ISO\/EMSA 22029:2012 format spectra in a ZIP file",
"description": "A ZIP file containing ISO\/EMSA 22029:2012 format X-ray spectra",
"mediaType": "application\/x-zip-compressed",
"title": "Energy Dispersive X-ray Spectra"
},
{
"downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-3244\/3244_README.txt",
"format": "ASCII Text",
"description": "The READ_ME file associated with this data set.",
"mediaType": "text\/plain",
"title": "READ_ME"
},
{
"downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-3244\/Accuracy_5keV_Table-1.csv",
"format": "A table in comma-separated value format.",
"description": "This table summarizes the quantitative X-ray microanalysis results from the spectrum files included in this data asset.",
"mediaType": "text\/csv",
"title": "Table 1 from the publication."
},
{
"downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-3244\/Testing%20the%20Accuracy%20of%20Low%20Beam%20Energy%20X-ray%20Analysis_Review.pdf",
"format": "Adobe Portable Document Format",
"description": "Submitted draft text of the article \"Testing the Accuracy...\" as last edited on 7-11-2024.",
"mediaType": "application\/pdf",
"title": "Submitted draft text of the article \"Testing the Accuracy...\""
}
],
"bureauCode": [
"006:55"
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"modified": "2024-04-18 00:00:00",
"publisher": {
"@type": "org:Organization",
"name": "National Institute of Standards and Technology"
},
"theme": [
"Materials:Materials characterization",
"Chemistry:Analytical chemistry"
],
"keyword": [
"X-ray micronalysis",
"Energy dispersive X-ray spectrometry",
"EDS",
"EDX",
"XEDS",
"Silicon drift detector",
"SDD",
"Low beam energy",
"quantitative x-ray microanalysis"
]
}
