Data provided by National Institute of Standards and Technology

This data set consists of both measured and simulated optical intensities scattered off periodic line arrays, with simulations based upon an average geometric model for these lines. These data were generated in order to determine the average feature sizes based on optical scattering, which is an inverse problem for which solutions to the forward problem are calculated using electromagnetic simulations after a parameterization of the feature geometry. Here, the array of features measured and modeled is periodic in one-dimension (i.e., a line grating) with a nominal line width of 100 nm placed at 300 nm intervals, or pitch = 300 nm; the short-hand label for the features is "L100P300." The entirety of the modeled data is included, over two thousand simulations that are indexed using a top, middle, and bottom linewidth as floating parameters. Two subsets of these data, featuring differing sampling strategies, are also provided. This data set also contains angle-resolved optical measurements with uncertainties for nine arrays which differ in their dimensions due to lithographic variations using a focus/exposure matrix, as identified in a previous publication (https://doi.org/10.1117/12.777131). We have previously reported line widths determined from these measurements based upon non-linear regression to compare theory to experiment. Machine learning approaches are to be fostered for solving such inverse problems. Data are formatted for direct use in "Model-Based Optical Metrology in R: MoR" software which is also available from data.nist.gov. (https://doi.org/10.18434/T4/1426859). Note: Certain commercial materials are identified in this dataset in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials are necessarily the best available for the purpose.

## About this Dataset

**Updated:**2022-07-29

**Metadata Last Updated:**2020-08-14

**Date Created:**N/A

**Views:**

**Data Provided by:**

National Institute of Standards and Technology

**Dataset Owner:**N/A

Title | Optical scattering measurements and simulation data for one-dimensional (1-D) patterned periodic sub-wavelength features |
---|---|

Description | This data set consists of both measured and simulated optical intensities scattered off periodic line arrays, with simulations based upon an average geometric model for these lines. These data were generated in order to determine the average feature sizes based on optical scattering, which is an inverse problem for which solutions to the forward problem are calculated using electromagnetic simulations after a parameterization of the feature geometry. Here, the array of features measured and modeled is periodic in one-dimension (i.e., a line grating) with a nominal line width of 100 nm placed at 300 nm intervals, or pitch = 300 nm; the short-hand label for the features is "L100P300." The entirety of the modeled data is included, over two thousand simulations that are indexed using a top, middle, and bottom linewidth as floating parameters. Two subsets of these data, featuring differing sampling strategies, are also provided. This data set also contains angle-resolved optical measurements with uncertainties for nine arrays which differ in their dimensions due to lithographic variations using a focus/exposure matrix, as identified in a previous publication (https://doi.org/10.1117/12.777131). We have previously reported line widths determined from these measurements based upon non-linear regression to compare theory to experiment. Machine learning approaches are to be fostered for solving such inverse problems. Data are formatted for direct use in "Model-Based Optical Metrology in R: MoR" software which is also available from data.nist.gov. (https://doi.org/10.18434/T4/1426859). Note: Certain commercial materials are identified in this dataset in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials are necessarily the best available for the purpose. |

Modified | N/A |

Publisher Name | National Institute of Standards and Technology |

Contact | mailto:bryan.barnes@nist.gov |

Keywords | electromagnetic simulations , simulations , experimental , angle-resolved scattering , scattering , gratings , patterned semiconductors , semiconductors , scatterfield microscopy , bright-field microscopy , microscopy , inverse problems , machine learning |

{ "identifier": "ark:\/88434\/mds2-2290", "accessLevel": "public", "references": [ "https:\/\/dx.doi.org\/10.1117\/12.816569", "https:\/\/dx.doi.org\/10.1117\/12.827676", "https:\/\/dx.doi.org\/10.1364\/AO.51.006196", "https:\/\/dx.doi.org\/10.1088\/1361-6501\/aa5586", "https:\/\/dx.doi.org\/10.1117\/12.2551504" ], "contactPoint": { "hasEmail": "mailto:bryan.barnes@nist.gov", "fn": "Bryan Barnes" }, "programCode": [ "006:045" ], "@type": "dcat:Dataset", "landingPage": "https:\/\/data.nist.gov\/od\/id\/mds2-2290", "description": "This data set consists of both measured and simulated optical intensities scattered off periodic line arrays, with simulations based upon an average geometric model for these lines. These data were generated in order to determine the average feature sizes based on optical scattering, which is an inverse problem for which solutions to the forward problem are calculated using electromagnetic simulations after a parameterization of the feature geometry. Here, the array of features measured and modeled is periodic in one-dimension (i.e., a line grating) with a nominal line width of 100 nm placed at 300 nm intervals, or pitch = 300 nm; the short-hand label for the features is \"L100P300.\" The entirety of the modeled data is included, over two thousand simulations that are indexed using a top, middle, and bottom linewidth as floating parameters. Two subsets of these data, featuring differing sampling strategies, are also provided. This data set also contains angle-resolved optical measurements with uncertainties for nine arrays which differ in their dimensions due to lithographic variations using a focus\/exposure matrix, as identified in a previous publication (https:\/\/doi.org\/10.1117\/12.777131). We have previously reported line widths determined from these measurements based upon non-linear regression to compare theory to experiment. Machine learning approaches are to be fostered for solving such inverse problems. Data are formatted for direct use in \"Model-Based Optical Metrology in R: MoR\" software which is also available from data.nist.gov. (https:\/\/doi.org\/10.18434\/T4\/1426859). Note: Certain commercial materials are identified in this dataset in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials are necessarily the best available for the purpose.", "language": [ "en" ], "title": "Optical scattering measurements and simulation data for one-dimensional (1-D) patterned periodic sub-wavelength features", "distribution": [ { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Pi_L100P300_sim_All.csv.sha256", "mediaType": "text\/plain", "title": "SHA256 File for Pi_L100P300_sim_All.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Pi_L100P300_sim_All.csv", "format": "comma-separated values", "description": "2566 x 3 matrix of parametric values used as inputs the scattering code for simulation. Values are in nanometers.", "mediaType": "application\/vnd.ms-excel", "title": "Pi_L100P300_sim_All.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Phi_L100P300_sim_All.csv.sha256", "mediaType": "text\/plain", "title": "SHA256 File for Phi_L100P300_sim_All.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Phi_L100P300_sim_All.csv", "format": "comma-separated values", "description": "2566 x 84 matrix of simulated intensities from the scattering off a periodic structure parameterized using a double-trapezoid cross-section. These intensities are normalized and unit-less.", "mediaType": "application\/vnd.ms-excel", "title": "Phi_L100P300_sim_All.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Imean_L100P300_exp.csv.sha256", "mediaType": "text\/plain", "title": "SHA256 File for Imean_L100P300_exp.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Imean_L100P300_exp.csv", "format": "comma-separated values", "description": "9 x 84 matrix of measurements determined from repeated measurements of the intensities scattered off the nine measured \"L100P300\" targets, specifically within nine dies on a single wafer. Each row of intensities corresponds to a single die. These intensities are normalized and unit-less.", "mediaType": "application\/vnd.ms-excel", "title": "Imean_L100P300_exp.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/labels_L100P300.csv.sha256", "mediaType": "text\/plain", "title": "SHA256 File for labels_L100P300.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/labels_L100P300.csv", "format": "comma-separated values", "description": "3 x 84 matrix of labels assignable to the 84 columns. Rows correspond to linear polarization state, plane of incidence, and angle of incidence (in degrees).", "mediaType": "application\/vnd.ms-excel", "title": "labels_L100P300.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/y_L100P300_Die1_exp.csv.sha256", "mediaType": "text\/plain", "title": "SHA256 File for y_L100P300_Die1_exp.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/invV_L100P300_Die1_exp.csv.sha256", "mediaType": "text\/plain", "title": "SHA256 File for invV_L100P300_Die1_exp.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/invV_L100P300_Die1_exp.csv", "format": "comma-separated values", "description": "84 x 84 matrix that is formatted for use with M.o.R. It is the inverse of the V matrix in the regression. It corresponds to the same die as that for \"y_L100P300_Die1.csv\". Unitless.", "mediaType": "application\/vnd.ms-excel", "title": "invV_L100P300_Die1_exp.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Pi_L100P300_sim_467.csv.sha256", "mediaType": "text\/plain", "title": "SHA256 File for Pi_L100P300_sim_467.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Phi_L100P300_sim_467.csv.sha256", "mediaType": "text\/plain", "title": "SHA256 File for Phi_L100P300_sim_467.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Phi_L100P300_sim_467.csv", "format": "comma-separated values", "description": "467 x 84 matrix of simulated intensities from the scattering off a periodic structure parameterized using a double-trapezoid cross-section. Normalized and unit-less. Formatted for use in M.o.R., this is a subset of the larger dataset.", "mediaType": "application\/vnd.ms-excel", "title": "Phi_L100P300_sim_467.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Pi_L100P300_sim_140.csv.sha256", "mediaType": "text\/plain", "title": "SHA256 File for Pi_L100P300_sim_140.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Pi_L100P300_sim_140.csv", "format": "comma-separated values", "description": "140 x 3 matrix of parametric values used as inputs the scattering code for simulation. Values in nanometers. This is a subset of the larger dataset formatted for use in M.o.R., sized for use in machine learning.", "mediaType": "application\/vnd.ms-excel", "title": "Pi_L100P300_sim_140.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Phi_L100P300_sim_140.csv.sha256", "mediaType": "text\/plain", "title": "SHA256 File for Phi_L100P300_sim_140.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Phi_L100P300_sim_140.csv", "format": "comma-separated values", "description": "140 x 84 matrix of simulated intensities from the scattering off a periodic structure paramerized using a double-trapezoid cross-section. Normalized and unitless. This is a subset of the larger dataset formatted for use in M.o.R., sized for use in machine learning.", "mediaType": "application\/vnd.ms-excel", "title": "Phi_L100P300_sim_140.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Pi_L100P300_sim_Comparison.png.sha256", "mediaType": "text\/plain", "title": "SHA256 File for Pi_L100P300_sim_Comparison.png" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Pi_L100P300_sim_Comparison.png", "format": "PNG image file", "description": "Image illustrating the sampling of the full three-parameter space using the full set of 2566 simulations and the smaller subset of 467 simulations.", "mediaType": "image\/png", "title": "Pi_L100P300_sim_Comparison.png" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Pi_L100P300_sim_20_through_140.png.sha256", "mediaType": "text\/plain", "title": "SHA256 File for Pi_L100P300_sim_20_through_140.png" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Pi_L100P300_sim_20_through_140.png", "format": "PNG image file", "description": "Image illustrating the 140 x 3 sampling of the full three-parameter space as it developed by multiples of 20 using a Halton sequence.", "mediaType": "image\/png", "title": "Pi_L100P300_sim_20_through_140.png" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/scatter1D_readme.txt", "format": "text file", "description": "README file describing these data files, both experimental and simulation, and the relationships among them.", "mediaType": "text\/plain", "title": "scatter1D_readme.txt" }, { "accessURL": "https:\/\/doi.org\/10.18434\/mds2-2290", "title": "DOI Access for Optical scattering measurements and simulation data for one-dimensional (1-D) patterned periodic sub-wavelength features" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/y_L100P300_Die1_exp.csv", "format": "comma-separated values", "description": "1 x 84 vector formatted for use with our group's published regression software, M.o.R (http:\/\/doi.org\/10.18434\/T4\/1502429). It is a subset of \"Imean_L100P300_exp.csv\"", "mediaType": "application\/vnd.ms-excel", "title": "y_L100P300_Die1_exp.csv" }, { "downloadURL": "https:\/\/data.nist.gov\/od\/ds\/mds2-2290\/Pi_L100P300_sim_467.csv", "format": "comma-separated values", "description": "467 x 3 matrix of parametric values used as inputs the scattering code for simulation. Values in nanometers. Formatted for use in M.o.R., this is a subset of the larger dataset.", "mediaType": "application\/vnd.ms-excel", "title": "Pi_L100P300_sim_467.csv" } ], "license": "https:\/\/www.nist.gov\/open\/license", "bureauCode": [ "006:55" ], "rights": "Certain commercial materials are identified in this dataset in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor i", "modified": "2020-08-14 00:00:00", "publisher": { "@type": "org:Organization", "name": "National Institute of Standards and Technology" }, "accrualPeriodicity": "irregular", "theme": [ "Nanotechnology:Nanometrology", "Metrology:Dimensional metrology", "Manufacturing:Process measurement and control" ], "issued": "2021-01-05", "keyword": [ "electromagnetic simulations", "simulations", "experimental", "angle-resolved scattering", "scattering", "gratings", "patterned semiconductors", "semiconductors", "scatterfield microscopy", "bright-field microscopy", "microscopy", "inverse problems", "machine learning" ] }