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Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds

These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.

About this Dataset

Updated: 2024-02-22
Metadata Last Updated: 2018-10-17
Date Created: N/A
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Data Provided by:
Electron Back Scatter Diffraction
Dataset Owner: N/A

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Title Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds
Description These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.
Modified N/A
Publisher Name National Institute of Standards and Technology
Contact mailto:william.osborn@nist.gov
Keywords Electron Back Scatter Diffraction , EBSD , flat field , background subtraction , Electron Beam Induced Deposition , EBID , Pt , W
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}

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