Data provided by National Institute of Standards and Technology
Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry
About this Dataset
Updated: 2024-02-22
Metadata Last Updated:
2018-12-01
Date Created:
N/A
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Data Provided by:
Semiconductor metrology
Dataset Owner:
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| Title | X-ray Metrology for the Semiconductor Industry Tutorial |
|---|---|
| Description | Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry |
| Modified | 2018-12-01 |
| Publisher Name | National Institute of Standards and Technology |
| Contact | mailto:r.kline@nist.gov |
| Keywords | Semiconductor metrology , dimensional metrology , small angle x-ray scattering |
{
"identifier": "7CE906EBFAD7231EE0532457068153892009",
"accessLevel": "public",
"contactPoint": {
"hasEmail": "mailto:r.kline@nist.gov",
"fn": "Regis Kline"
},
"programCode": [
"006:045"
],
"@type": "dcat:Dataset",
"landingPage": "https:\/\/www.nist.gov\/mml\/materials-science-and-engineering-division\/polymers-processing-group\/x-ray-metrology",
"description": "Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry",
"language": [
"en"
],
"title": "X-ray Metrology for the Semiconductor Industry Tutorial",
"distribution": [
{
"accessURL": "https:\/\/doi.org\/10.18434\/T4\/1503330",
"format": "text\/html",
"description": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial",
"title": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial"
}
],
"license": "https:\/\/www.nist.gov\/open\/license",
"bureauCode": [
"006:55"
],
"modified": "2018-12-01",
"publisher": {
"@type": "org:Organization",
"name": "National Institute of Standards and Technology"
},
"theme": [
"Nanotechnology:Nanoelectronics",
"Metrology:Dimensional metrology",
"Electronics:Semiconductors",
"Nanotechnology:Nanometrology"
],
"keyword": [
"Semiconductor metrology",
"dimensional metrology",
"small angle x-ray scattering"
]
}
