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X-ray Metrology for the Semiconductor Industry Tutorial

Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry

About this Dataset

Updated: 2024-02-22
Metadata Last Updated: 2018-12-01
Date Created: N/A
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Data Provided by:
Semiconductor metrology
Dataset Owner: N/A

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Table representation of structured data
Title X-ray Metrology for the Semiconductor Industry Tutorial
Description Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry
Modified N/A
Publisher Name National Institute of Standards and Technology
Contact mailto:r.kline@nist.gov
Keywords Semiconductor metrology , dimensional metrology , small angle x-ray scattering
{
    "identifier": "7CE906EBFAD7231EE0532457068153892009",
    "accessLevel": "public",
    "contactPoint": {
        "hasEmail": "mailto:r.kline@nist.gov",
        "fn": "Regis Kline"
    },
    "programCode": [
        "006:045"
    ],
    "@type": "dcat:Dataset",
    "landingPage": "https:\/\/www.nist.gov\/mml\/materials-science-and-engineering-division\/polymers-processing-group\/x-ray-metrology",
    "description": "Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry",
    "language": [
        "en"
    ],
    "title": "X-ray Metrology for the Semiconductor Industry Tutorial",
    "distribution": [
        {
            "accessURL": "https:\/\/doi.org\/10.18434\/T4\/1503330",
            "format": "text\/html",
            "description": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial",
            "title": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial"
        }
    ],
    "license": "https:\/\/www.nist.gov\/open\/license",
    "bureauCode": [
        "006:55"
    ],
    "modified": "2018-12-01",
    "publisher": {
        "@type": "org:Organization",
        "name": "National Institute of Standards and Technology"
    },
    "theme": [
        "Nanotechnology:Nanoelectronics",
        "Metrology:Dimensional metrology",
        "Electronics:Semiconductors",
        "Nanotechnology:Nanometrology"
    ],
    "keyword": [
        "Semiconductor metrology",
        "dimensional metrology",
        "small angle x-ray scattering"
    ]
}

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