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NIST MEMS Calculator - SRD 166
Data provided by National Institute of Standards and Technology
This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams.
Tags: ASTM,MEMS 5 in 1,MEMS Calculators,Micro Electro Mechanical Systems,Semiconductor Equipment and Materials International,Standard Reference Material,Young's modulus measurements,cantilevers,data analysis sheets,fixed-fixed beams,height measurements,interferometries,length measurements,residual strains,residual stresses,steps,strain gradients,stress gradients,test structures,thick,vibrometries,
Modified: 2024-02-22
Views: 0
SRM 1450 Fibrous Glass Board: Retrospective Analysis
Data provided by National Institute of Standards and Technology
Thermal conductivity data acquired previously for the establishment of Standard Reference Material (SRM) 1450, Fibrous Glass Board, as well as subsequent renewals 1450a, 1450b, 1450c, and 1450d, are re-analyzed collectively and as individual data sets. Additional data sets for proto-1450 material lots are also included in the analysis (eleven data sets in total).
Tags: bulk density,certified reference material,fit,guarded hot plate,high density molded fibrous glass board,model,regression analysis,Standard Reference Material,thermal conductivity,thermal insulation,
Modified: 2024-02-22
Views: 0